San Jose State University

Teaching MEMS at Undergraduate Level

The paper presents the teaching of MEMS to undergraduate mechanical and electrical engineering students. Topics included: the scaling laws, electromechanical principles of sensors and actuators, silicon-based and polymer materials, physical-chemical processes for microfabrication, MEMS systems design, and assembly-packaging-testing techniques. Prominent topics in nanoscale engineering were also included in the end.

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